Iterative procedure for in-situ EUV optical testing with an incoherent source

نویسندگان

  • Ryan Miyakawa
  • Patrick Naulleau
  • Avideh Zakhor
چکیده

We propose an iterative method for in-situ optical testing under partially coherent illumination that relies on the rapid computation of aerial images. In this method a known pattern is imaged with the test optic at several planes through focus. A model is created that iterates through possible aberration maps until the through-focus series of aerial images matches the experimental result. The computation time of calculating the through-focus series is significantly reduced by a-SOCS, an adapted form of the Sum Of Coherent Systems (SOCS) decomposition. In this method, the Hopkins formulation is described by an operator S which maps the space of pupil aberrations to the space of aerial images. This operator is well approximated by a truncated sum of its spectral components.

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تاریخ انتشار 2009